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Ion-plasma processing Micro-and Nanostructures “Titanium-2” compact device
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PURPOSE AND SCOPE An ion - plasma processing of micro - and nanostructures "Titan - 2" compact reactor is intended for reactive plasma processing of micro - and nanostructures in microelectronics, the deposition of thin films and basic research in physics of gas discharge. The results of the work...
Group: Bioreactors


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