Multifunctional cluster system for reactive ionized plasma synthesis of compositional compounds PP136
Purpose and areas of usage
The cluster functional unit is intended for the synthesis and investigation of the attributes of nanostructured functional lamina and nanostructured elements. At the unit, the technologies of synthesis of single - and multi - layer coatings of oxides and oxynitrides of transition metals of TiN, TiAlN, TiO, Al2O3, Ta2O5, TiN / Al2O3, TiN / TiO and others were worked out. Nanostructured laminas and coatings are intended for the needs of mechanical engineering, instrument making, nuclear energy and biomedicine.
Gist of development
Cluster unit of reactive ionized plasma synthesis of compositional compounds, reinforcing and corrosion - resistant coatings contains two low - pressure magnetrons with a target diameter of 170 mm. A source of ions with energy of 2 - 5 keV of type "Radikal - M" with a diameter of a beam of 100 mm, which is mounted on the flanges of the working chamber. A high - frequency induction source of chemically active particles and plasma with energies of ions of 30 - 50 eV and a current density of up to 5 mA / cm2.
Main advantages of development
By design, the installation is original, compared with the known analogs. It is more compact and capable of forming nanosized functional laminas and nanostructured elements with high resolution. The development of low - energy, operatively reconfigured, compared with known analogs, its value is estimated at 2 times lower.
Market demand is high. Mechanical engineering, instrument making and electronic industry - as technological equipment. Research institutions - as experimental equipment.